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| Author(s): |
Eliphas Wagner Simões
Total Authors: 1
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| Document type: | Doctoral Thesis |
| Press: | São Paulo. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 2000-03-22 |
| Examining board members: |
Rogerio Furlan;
Luiz Otávio Saraiva Ferreira;
Ronaldo Domingues Mansano;
Marcos Tadeu Pereira;
Mario Ricardo Gongora Rubio
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| Advisor: | Rogerio Furlan; Dong Ho Choi |
| Abstract | |
This work focused on the study of microfluidic devices implemented in silicon. Microactuators with no moving parts, microfluidic amplifiers, were designed, implemented and characterized. These types of devices have at least four basic functional parts: a supply port, control ports, output ports, and an interaction region. Vents can be also added to decrease the internal pressure of the device. The fluid flow emerging from the supply port generates a jet that interacts with flows from the control ports in the interaction region. As a result, the jet from the supply nozzle is directed to one or another output, depending on the pressure or flow of the control inputs. Numerical analyses with the package ANSYS/FLOTRAN permitted to understand the behavior of the internal flow and to create a base for design of devices with different geometrical configurations. The fabricated devices were micromachined in silicon using a combination of wet and dry etching. The obtained microchannels (hydraulic diameters of 30 - 40 µm) were sealed with glass. The complete structures have maximum areas of 18 mm x 6 mm, including interconnection microchannels. Gas flow control was obtained with flow gaims (output flow/control flow) as high as 8.5 ande the gain is a function of the supply flow. Liquid flow control was easier obtained by using gas for control. (AU) | |