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Development of diaphragm micropump with magnetic actuation

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Author(s):
Camila Dalben Madeira Campos
Total Authors: 1
Document type: Master's Dissertation
Press: Campinas, SP.
Institution: Universidade Estadual de Campinas (UNICAMP). Faculdade de Engenharia Mecânica
Defense date:
Examining board members:
Eurípedes Guilherme de Oliveira Nóbrega; Luiz Otavio Saraiva Ferreira; Stanislav Moshkalev
Advisor: Eurípedes Guilherme de Oliveira Nóbrega
Abstract

This investigation was conducted to develop a new membrane micropump, magnetically actuated, able to be used in lab-on-a-chip devices. To reach this target, a new actuator was eloped, containing a microcoil and a flexible diaphragm covered with metallic film, and a bond-graph model, leading future applications planning. The diaphragm was made using photocurable polyurethane acrylate resin or silicon etched in KOH bath, covered with pure nickel films, deposited by sputtering and electroplating techniques and electroplated CoNiMnP films. Diaphragms reached 1 ?m displacement facing 250G magnetic fields. Microcoils, obtained by electroplating over alumina surfaces, produced magnetic fields close to 50G. Micropump pumping chamber diameter of 10 mm, made using polyurethane acrylate and using the described actuator produced good water flow in the tests (AU)

FAPESP's process: 09/04597-6 - Development of a eletromagnetic membrane micropump
Grantee:Camila Dalben Madeira Campos
Support Opportunities: Scholarships in Brazil - Master