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| Author(s): |
Laura Ramos de Freitas
Total Authors: 1
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| Document type: | Doctoral Thesis |
| Press: | Campinas, SP. |
| Institution: | Universidade Estadual de Campinas (UNICAMP). Instituto de Física Gleb Wataghin |
| Defense date: | 2005-12-16 |
| Examining board members: |
Antonio Manoel Mansanares;
Edson Corrêa da Silva;
Newton Cesário Frateschi;
Nelia Ferreira Leite;
Helion Vargas
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| Advisor: | Antonio Manoel Mansanares |
| Abstract | |
Photothermal microscopy has been used as a suitable technique for the investigation of micro- and opto-electronic devices in operating cycle, because of its non-contact and non-destructive character. This technique is based on the dependence of the sample reflectance with temperature and with local electric field, as well as with free carrier density, which are in their turn disturbed by defects. This fact makes this technique very useful for investigating defects in fabrication and aging processes of such structures. In the present work, we report an experimental and theoretical study of the thermoreflectance response as a function of the probe wavelength for layered microelectronics structures. The investigated samples consisted of polycrystalline silicon conducting tracks from various chips. Thermore²ectance measurements were carried out in the wavelength range from 450 to 750 nm with the tracks biased in modulated regime, with three diÿerent experimental setups. An oscillating pattern is observed in the spectral region where the upper layer is transparent. Such oscillations are due to the interference resulting from the multiple reflections at the interfaces. Using a thermo-optical model, we show that the optical constants (n and k) of the materials, which are wavelength dependents, as well as their temperature derivatives (dn/dT and dk/dT), strongly in²uence the thermoreflectance signal. The optical thicknesses of the layers, mainly determined by the real part of the refractive indexes, de½ne the period of oscillation. On the other hand, the imaginary part of the refractive indexes establishes the cutoÿ wavelength of the oscillations. Below this cutoÿ wavelength, the probe light does not penetrate the material, and the upper surface reflectance dominates the signal (AU) | |