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Micromachining of dieletrics with femtosecond laser pulses

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Author(s):
Leandro Matiolli Machado
Total Authors: 1
Document type: Doctoral Thesis
Press: São Paulo.
Institution: Universidade de São Paulo (USP). Instituto de Pesquisas Energéticas e Nucleares (IPEN/BT)
Defense date:
Examining board members:
Wagner de Rossi; Marcelo Nelson Paez Carreno; Rudimar Riva; Ricardo Elgul Samad; Niklaus Ursus Wetter
Advisor: Wagner de Rossi
Abstract

In this study, the diameter regression method was used to measure the ablation threshold of Suprasil, BK7, Sapphire and Ti: Sapphire by femtosecond pulses. Through measurements of the ablation thresholds for single and overlapping pulses, the incubation parameter for each dielectric was quantified. These preliminary steps were used to validate the method called Diagonal Scan or D-scan. This was made possible by expanding the D-scan formalism, which allowed the quantification of overlapping pulses during its use. The simplicity of the D-scan method allowed the ablation threshold measurement in BK7 for different temporal widths and overlaps. The ablation threshold for single pulse for different temporal width was compared with a theoretical simulation. From the knowledge of the parameter of incubation, a methodology that considers dielectric machining overlapping pulses during ablation was developed. This allowed the manufacture of microchannels on BK7 for microfluidics. (AU)

FAPESP's process: 08/00284-0 - Micromachining of optical components with femtosecond laser
Grantee:Leandro Matiolli Machado
Support Opportunities: Scholarships in Brazil - Doctorate (Direct)