CV Lattes
Universidade de São Paulo (USP). Escola Politécnica (EP) (Institutional affiliation from the last research proposal) Birthplace: Brazil
graduate at Engenharia Eletrônica from Universidade de São Paulo (1963) and ph.d. at Electric Engineering from Universidade de São Paulo (1968). Has experience in Electric Engineering, focusing on Electronic Circuits (Source: Lattes Curriculum)
| News published in Agência FAPESP Newsletter about the researcher |
| More itemsLess items |
| TITULO |
| Articles published in other media outlets ( ): |
| More itemsLess items |
| VEICULO: TITULO (DATA) |
| VEICULO: TITULO (DATA) |
In this project, we studied the stress influence in the quality of TEOS PECVD silicon oxide, titanium silicides, silicon nitride and poly silicon thin films. The stress versus temperature analysis in the TEOS PECVD silicon oxide showed hysteresis that indicate a variation in the intrinsic stress due to structural modification in the film. The deposition process pressure has a small influe…
| 11 / 3 | Completed research grants |
| 2 / 0 | Completed scholarships in Brazil |
| 13 / 3 | All research grants and scholarships |
| Associated processes | |