Suspended Slow-Wave transmission lines for mm-wave applications

Author(s)

Gomes, Leonardo G. ; Serrano, Ariana L. C. ; Ferrari, Philippe ; Rehder, Gustavo P. ; IEEE

• Document type: Journal article
• Source: 2019 34TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2019); v. N/A, p. 4-pg., 2019-01-01.

Abstract

This paper presents and validate the concept of a suspended, slow-wave microstrip transmission line that uses air as a substrate. The lines are fabricated on a low-cost interposer technology, the metallic nanowire membrane (MnM), that allows selective growth of copper nanowires, enabling transmission lines with a wide range of Z(c). Lines with widths of 35 mu m, 25 mu m and 15 mu m were designed and fabricated with 1, 2 or 4 suspended segments of 250 mu m or 500 mu m of length. Parametric extraction from the measured S-parameters showed epsilon(eff) ranging from 5 to 7.5, alpha smaller than 0.8 dB/mm at 70 GHz and Q as high as 55. Z(c) varied between 65 Omega and 90 Omega. (AU)

• FAPESP's process: 16/25779-9 - Multi-User Equipment aproved in grant 2012/15159-2: Vector Network Analyser (VNA) up to 70 GHz
• Grantee: Ariana Maria da Conceicao Lacorte Caniato Serrano
• Support Opportunities: Multi-user Equipment Program