Interferometric Measurements of Nanometric Displacements in a Piezoelectric Flextensional Actuator by Using the New J(1) ... J(5) Method

Author(s)

Marcal, Luiz A. P. ; Galeti, Jose Henrique ; Higuti, Ricardo T. ; Kitano, Claudio ; Silva, Emilio C. N. ; IEEE

• Document type: Journal article
• Source: 2012 10TH IEEE/IAS INTERNATIONAL CONFERENCE ON INDUSTRY APPLICATIONS (INDUSCON); v. N/A, p. 6-pg., 2012-01-01.

Abstract

In this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson interferometer. A new improved version of the J(1) ... J(4) method for optical phase measurements, named J(1) ... J(5) method, is presented, which is of easier implementation than the original one. This is a passive phase detection scheme, unaffected by signal fading, source instabilities and changes in visibility. Experimental results using this improvement were compared with those obtained by using the J(1) ... J(4), J(1) ... J(6)(pos) and J(1) ... J(6)(neg) methods, concluding that the dynamic range is increased while maintaining the sensitivity. Analysis based on the 1/f voltage noise and random fading show the new method is more stable to phase drift than all those methods. (AU)

• FAPESP's process: 12/01629-7 - Characterization of novel classes of piezoelectric flextensional actuators and multi-actuated piezoelectric actuators by using optical interferometry
• Grantee: Claudio Kitano
• Support Opportunities: Regular Research Grants