Mechanical properties of boron nitride thin films obtained by RF-PECVD at low temperatures

Vilcarromero‚ J.; Carreño‚ MNP; Pereyra‚ I.

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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Mechanical properties of boron nitride thin films obtained by RF-PECVD at low temperatures

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Author(s):	Vilcarromero‚ J. ; Carreño‚ MNP ; Pereyra‚ I. Total Authors: 3
Document type:	Journal article
Source:	Thin Solid Films; v. 373, n. 1, p. 273-276, 2000.

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