Influence of chemical sputtering on the composition and bonding structure of carbon nitride films

Hammer‚ P.; Alvarez‚ F.

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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Influence of chemical sputtering on the composition and bonding structure of carbon nitride films

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Author(s):	Hammer‚ P. ; Alvarez‚ F. Total Authors: 2
Document type:	Journal article
Source:	Thin Solid Films; v. 398, p. 116-123, 2001.

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