Structural investigation of Si-rich amorphous silicon oxynitride films

Scopel‚ WL; Fantini‚ MCA; Alayo‚ MI; Pereyra‚ I.

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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Structural investigation of Si-rich amorphous silicon oxynitride films

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Author(s):	Scopel‚ WL ; Fantini‚ MCA ; Alayo‚ MI ; Pereyra‚ I. Total Authors: 4
Document type:	Journal article
Source:	Thin Solid Films; v. 425, n. 1, p. 275-281, 2003.

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