| Full text | |
| Author(s): |
Galeti, Jose Henrique
[1]
;
Berton, Paula Lalucci
[1]
;
Kitano, Claudio
[1]
;
Higuti, Ricardo Tokio
[1]
;
Carbonari, Ronny Calixto
[2]
;
Nelli Silva, Emilio Carlos
[3]
Total Authors: 6
|
| Affiliation: | [1] Univ Estadual Paulista UNESP, Dept Elect Engn, BR-15385000 Ilha Solteira, SP - Brazil
[2] Fed Univ ABC, Ctr Engn Modelagem & Ciencias Sociais Aplicades, BR-09210170 Santo Andre, SP - Brazil
[3] EPUSP, Dept Mechatron & Mech Syst Engn, BR-05508030 Sao Paulo - Brazil
Total Affiliations: 3
|
| Document type: | Journal article |
| Source: | APPLIED OPTICS; v. 52, n. 28, p. 6919-6930, OCT 1 2013. |
| Web of Science Citations: | 7 |
| Abstract | |
Multiactuated piezoelectric flextensional actuators (MAPFAs) is a fast-growing technology in development, with a wide range of applications in precision mechanics and nanotechnology. In turn, optical interferometry is an adequate technique to measure nano/micro-displacements and to characterize these MAPFAs. In this work, an efficient method for homodyne phase detection, based on a well-known Bessel functions recurrence relation, is developed, providing practical applications with a high dynamic range. Fading and electronic noise are taken into account in the analysis. An important advantage of the method is that, for each measurement, only a limited number of frequencies in the magnitude spectrum of the photodetected signal are used, without the need to know the phase spectrum. The dynamic range for phase demodulation is from 0.2 to 100 pi rad (or 10 nm to 16 mu m for displacement, using 632.8 nm wavelength). The upper range can be easily expanded by adapting the electronic system to the signal characteristics. By using this interferometric technique, a new XY nanopositioner MAPFA prototype is tested in terms of linearity, displacement frequency response, and coupling rate. (C) 2013 Optical Society of America (AU) | |
| FAPESP's process: | 12/01629-7 - Characterization of novel classes of piezoelectric flextensional actuators and multi-actuated piezoelectric actuators by using optical interferometry |
| Grantee: | Claudio Kitano |
| Support Opportunities: | Regular Research Grants |