Thin film residual stress measurement during the deposition process

• Grant number: 09/05081-3
• Support Opportunities: Regular Research Grants
• Start date: June 01, 2009
• End date: May 31, 2011
• Field of knowledge: Engineering - Materials and Metallurgical Engineering - Physical Metallurgy
• Principal Investigator: Roberto Martins de Souza
• Grantee: Roberto Martins de Souza
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Abstract

This research proposal aims the development of an apparatus for in-situ thin film residual stress measurement. The measurements will provide better understanding of the deposition process, especially in situations where there is variation in the deposition parameters as a function of time. (AU)