Diffractive phase-shift lithography photomask operating in proximity printing mode

• Grant number: 10/51594-0
• Support Opportunities: Regular Research Grants - Publications - Scientific article
• Start date: September 01, 2010
• End date: February 28, 2011
• Field of knowledge: Physical Sciences and Mathematics - Physics - General Physics
• Principal Investigator: Giuseppe Antonio Cirino
• Grantee: Giuseppe Antonio Cirino
• Host Institution: Centro de Ciências Exatas e de Tecnologia (CCET). Universidade Federal de São Carlos (UFSCAR). São Carlos , SP, Brazil