Deposition of thick DLC films using plasma immersion with pulsed bias on the subst...
12th International Workshop on Plasma-Based Ion Implantation and Deposition
Films deposition and surface modification using plasma immersion with pulsed bias ...
Deposition of diamond-like carbon films on metal substrates by plasma immersion io...
Final testing and application of a new type of ion implanter
Ian G. Brown | Lawrence Berkeley Laboratory - Estados Unidos
Alumina film deposition assisted by plasma immersion ion implantation