Low temperature pecvd deposition of highly conductive microcrystalline silicon thin films.

• Grant number: 02/02573-3
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: June 10, 2002
• End date: June 21, 2002
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Ely Antonio Tadeu Dirani
• Grantee: Ely Antonio Tadeu Dirani
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil