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Characterization of surfaces chlorinated in plasmas and chlorinated thin films deposited in plasmas

Abstract

The deposition of amorphous chloinated thin films and the chlorination of surfaces in plasmas have diverse applications, amongst others,in biomaterials, the modification of fabric, and in the production of hydrogenated silicon films with excellent electrical characteristics. The present proposal deals first with the production of chlorinated surfaces using plasmas and the study of the chemical structure and the stoichiometry of these surfaces as a function of the system parameters, such as the gases used and their flow rates, the applied power and the treatment time. The influences of the chemical structure on properties such as morphology, roughness, and contact angle will be investigated. A second line of study is the production of amorphous hydrogenated chlorinated carbon and similar films by PECVD. Thus, a-C:H:Cl, a-C:H:N:Cl and a-C:H:Si:Cl films may be produced from plasmas fed mixtures such as C2H5OH and chlorinated comonomers such as CHCl3 or CCl4, or monomers, such as C2H2Cl4, with or without a plasmogenic gas. Concerning the films, their chemical structure and composition will be examined using FTIR (Fourier Transform Infrared Spectroscopy) and X-ray Photo-electron Spectroscopy (XPS) as a function of the system parameters (types of gas, flow rates, applied power, etc.). Part of this proposal is to purchase an optical profilemeter for rapid and exact film thickness determinations. Atomic Force Microscopy will be used to examine the morphology and roughness of the treated surfaces and of the films deposited. For the films, Ultraviolet-visible spectroscopy (UVS)will also be used (Perkin Elmer, model Lambda 750), in the wavelength range of 200 nm to 3300 nm, to obtain transmission spectra. From these spectra and film thickness measurements, refractive indices, absorption coefficients and optical gaps of the film material will be calculated. the use of semi-empirical models will permit elucidation of the connection between the chemical structure of the chlorinated films and their optical properties. (AU)

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Scientific publications (10)
(References retrieved automatically from Web of Science and SciELO through information on FAPESP grants and their corresponding numbers as mentioned in the publications by the authors)
CHAVES, MICHEL; RAMOS, RAUL; MARTINS, EVERSON; RANGEL, ELIDIANE CIPRIANO; DA CRUZ, NILSON CRISTINO; DURRANT, STEVEN FREDERICK; RIBEIRO BORTOLETO, JOSE ROBERTO. Al-doping and Properties of AZO Thin Films Grown at Room Temperature: Sputtering Pressure Effect. MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, v. 22, n. 3 2019. Web of Science Citations: 1.
FERNANDES, GABRIEL FERREIRA; MANOSSO AMORIM, MILENA KOWALCZUK; TURRI, RAFAEL GUSTAVO; OLIVEIRA, PAULO SILAS; GRAFF, ISMAEL LEANDRO; RANGEL, ELIDIANE CIPRIANO; DURRANT, STEVEN FREDERICK. Plasma Treatment of Crosslinked Polyethylene Tubes for Improved Adhesion of Water-based Paints. MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, v. 22, n. 1 2019. Web of Science Citations: 0.
FERNANDES, ISABELA CRISTINA; HADICH, TAYAN VIEIRA; MANOSSO AMORIM, MILENA KOWALCZUK; TURRI, RAFAEL GUSTAVO; RANGEL, ELIDIANE C.; DIAS DA SILVA, JOSE HUMBERTO; DURRANT, STEVEN F. Structural and optical properties of a-C: H:O:Cl and a-C:H:Si:O:Cl films obtained by Plasma Enhanced Chemical Vapor Deposition. Materials Chemistry and Physics, v. 214, p. 277-284, AUG 1 2018. Web of Science Citations: 0.
RESENDE, RENATO CARVALHO; WALDMAN, WALTER RUGGERI; DA CRUZ, NILSON CRISTINO; DURRANT, STEVEN F.; RANGEL, ELIDIANE CIPRIANO. Surface properties and corrosion resistance of SF6 plasma-treated polyester-based thermoplastic elastomer. SURFACE AND INTERFACE ANALYSIS, v. 50, n. 1, p. 13-26, JAN 2018. Web of Science Citations: 0.
ROSSI, DIEGO; LANDERS, RICHARD; BORTOLETO, JOSE R. R.; DURRANT, STEVEN F. Characterization of PECVD a-C:H:Si:O:Cl films. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v. 35, n. 4, SI JUL-AUG 2017. Web of Science Citations: 2.
TURRI, RAFAEL GUSTAVO; MANOSSO AMORIM, MILENA KOWALCZUK; HADICH, TAYAN VIEIRA; FERNANDES, ISABELA CRISTINA; FERNANDES, GABRIEL FERREIRA; ROSSI, DIEGO; RANGEL, ELIDIANE CIPRIANO; DURRANT, STEVEN FREDERICK. Effects of Aging on Chlorinated Plasma Polymers. MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, v. 20, n. 4, p. 862-865, JUL-AUG 2017. Web of Science Citations: 1.
SANTOS, NAZIR M.; GONCALVES, THAIS M.; DE AMORIM, JAYR; FREIRE, CELIA M. A.; BORTOLETO, JOSE R. R.; DURRANT, STEVEN F.; RIBEIRO, RAFAEL PARRA; CRUZ, NILSON C.; RANGEL, ELIDIANE C. Effect of the plasma excitation power on the properties of SiOxCyHz films deposited on AISI 304 steel. SURFACE & COATINGS TECHNOLOGY, v. 311, p. 127-137, FEB 15 2017. Web of Science Citations: 4.
Effects of Aging on Chlorinated Plasma Polymers. MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, n. ahead, p. -, 2017.
RAFAEL GUSTAVO TURRI; MILENA KOWALCZUK MANOSSO AMORIM; TAYAN VIEIRA HADICH; ISABELA CRISTINA FERNANDES; GABRIEL FERREIRA FERNANDES; DIEGO ROSSI; ELIDIANE CIPRIANO RANGEL; STEVEN FREDERICK DURRANT. Effects of Aging on Chlorinated Plasma Polymers. MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS, v. 20, n. 4, p. -, Ago. 2017.
ROSSI, DIEGO; SCHREINER, WIDO H.; DURRANT, STEVEN F. Characterization of amorphous hydrogenated chlorinated plasma polymers. SURFACE & COATINGS TECHNOLOGY, v. 289, p. 118-123, MAR 15 2016. Web of Science Citations: 5.

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