Su-8 photoresist as a cost reducing factor in liga-x technology.

Grant number:	01/10527-9
Support Opportunities:	Research Grants - Meeting - Brazil
Start date:	November 26, 2001
End date:	November 30, 2001
Field of knowledge:	Engineering - Chemical Engineering - Chemical Technology

Principal Investigator:	Izaque Alves Maia
Grantee:	Izaque Alves Maia

Host Institution:	Associação Brasileira de Tecnologia de Luz Síncrotron (ABTLuS). Ministério da Ciência, Tecnologia e Inovação (Brasil). Campinas , SP, Brazil

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