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EMU: multiuser infrastructure dedicated to nanofabrication and characterization of nanodevices at LNNano/CNPEM

Grant number: 19/14949-9
Support Opportunities:Multi-user Equipment Program
Duration: March 01, 2020 - February 28, 2027
Field of knowledge:Engineering - Materials and Metallurgical Engineering - Nonmetallic Materials
Principal Investigator:Edson Roberto Leite
Grantee:Edson Roberto Leite
Host Institution: Centro Nacional de Pesquisa em Energia e Materiais (CNPEM). Ministério da Ciência, Tecnologia e Inovações (Brasil). Campinas , SP, Brazil
Associated researchers:Alain André Quivy ; Antonio Riul Júnior ; Carlos César Bof Bufon ; Cecilia de Carvalho Castro e Silva ; Iouri Poussep ; Lucas Fugikawa Santos ; Osvaldo Novais de Oliveira Junior
As informações de acesso ao Equipamento Multiusuário são de responsabilidade do Pesquisador responsável
EMU web page: Página do Equipamento Multiusuário não informada
Type of equipment:Processos Físicos - Modificação superfícies – etching - Feixes iônicos
Processos Físicos - Litografia - Feixes de elétrons
Manufacturer: Fabricante não informado
Model: Modelo não informado


The Microfabrication (MF) techniques have revolutionized various sectors of society in the last 50 years and are mainly associated with electronics and information technology. MF is also responsible for the development of new functional devices such as elements for controlled drugs delivery and biosensors, both extremely relevant to the pharmaceutical and medical products industries, and have a direct impact on society. We also highlight that MF is an essential vector for current advances in photonics and quantum computing. In the same way, MF has become indispensable in the area of Materials Science as a transforming agent, being able to capture the new functionalities of microscopic systems for the macroscopic world. The MF can deliver complex patterns of high quality, resolution and high reproducibility. Due to the need for developments of devices with higher processing density and high miniaturization, the MF techniques evolved to nanofabrication (NF) techniques. The NF has as its primary tools the electron-beam nanolithography (eBL) and the ion-beam (iBL). These systems are sophisticated electronic microscopes that are modified and dedicated to the task of nanofabrication. The NF is already a reality today in high-performance electronic processors and is vital to understanding the physical and chemical phenomena at the nanometer level. The understanding of the fundamental aspects of electronic transport in 2D materials is only possible with the development of structures and devices that allow the injection and transport of electrons. In this case, the use of NF techniques makes possible to develop devices on a nanoscale scale. The understanding of the electrochemical phenomena of charge transfer and identification of electroactive sites at the molecular level (fundamental for the development of alternative energy sources), demands the development of nanoelectrodes. This project aims to build an NF infrastructure accessible to Paulista and Brazilian researchers. (AU)

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Scientific publications
(References retrieved automatically from Web of Science and SciELO through information on FAPESP grants and their corresponding numbers as mentioned in the publications by the authors)
MERCES, LEANDRO; CANDIOTTO, GRAZIANI; MINATOGAU FERRO, LETICIA MARIE; DE BARROS, ANERISE; SANTOS BATISTA, CARLOS VINICIUS; NAWAZ, ALI; RIUL JR, ANTONIO; CAPAZ, RODRIGO B.; BOF BUFON, CARLOS CESAR. Reorganization Energy upon Controlled Intermolecular Charge-Transfer Reactions in Monolithically Integrated Nanodevices. SMALL, v. 17, n. 45, . (14/25979-2, 18/18136-0, 14/50906-9, 19/10188-3, 17/02317-2, 17/21117-4, 19/14949-9)

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