Diffractive optical element applied to proximity exposure lithography exploring partial light coherence.

Grant number:	10/51023-2
Support Opportunities:	Research Grants - Meeting - Brazil
Start date:	September 27, 2010
End date:	September 30, 2010
Field of knowledge:	Engineering - Electrical Engineering - Electrical Materials

Principal Investigator:	Giuseppe Antonio Cirino
Grantee:	Giuseppe Antonio Cirino

Host Institution:	Centro de Ciências Exatas e de Tecnologia (CCET). Universidade Federal de São Carlos (UFSCAR). São Carlos , SP, Brazil

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