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Design of electrothermomechanical (ETM) MEMS using topology optimization method (TOM) considering the thermal transient response

Grant number: 10/02263-0
Support type:Scholarships in Brazil - Master
Effective date (Start): September 01, 2010
Effective date (End): August 31, 2011
Field of knowledge:Engineering - Mechanical Engineering - Mechanical Engineering Design
Principal researcher:Emílio Carlos Nelli Silva
Grantee:Ruben Andres Salas Varela
Home Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil


Microelectromechanical systems (MEMS) are mechanics systems in micrometric scale which has attracted great scientific interest around the world represented by investments in research and industrial applications. Development of methods for systematically design these systems, is still in early stage; usually the design relies on intuition, experience and trial and error approaches. In contrast manufacturing techniques have a high level of maturity and sophistication. Among examples of MEMS we can mention electrothermomechanical (ETM) Microsystems, which operates due to heating of the structure, caused by an electrical current that induces deformation by thermoelastic effect. A generic and systematic technique used in the design stage is Topology Optimization (TO). This work aims to use the topology optimization method (TOM) for ETM MEMS design taking into account transient thermal response in order to reduce their response time and maximize their output displacement. As response times of different physics involved in ETM structures have different magnitude orders and if a fast, damped and null (at steady state) transient response is desirable, it is necessary to minimize the response time of the slower phenomena, such as thermal effect, in order to improve its efficiency. The work follows the research line of the Laboratory of Sensors and Actuators located at Polytechnic School of University of São Paulo, related to design of MEMS. (AU)

Scientific publications
(References retrieved automatically from Web of Science and SciELO through information on FAPESP grants and their corresponding numbers as mentioned in the publications by the authors)
MOTTA MELLO, LUIS AUGUSTO; SALAS, RUBEN ANDRES; NELLI SILVA, EMILIO CARLOS. On response time reduction of electrothermomechanical MEMS using topology optimization. COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING, v. 247, p. 93-102, 2012. Web of Science Citations: 11.

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