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Design of electrothermomechanical (ETM) MEMS using topology optimization method (TOM) considering the thermal transient response.

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Author(s):
Ruben Andres Salas Varela
Total Authors: 1
Document type: Master's Dissertation
Press: São Paulo.
Institution: Universidade de São Paulo (USP). Escola Politécnica (EP/BC)
Defense date:
Examining board members:
Emílio Carlos Nelli Silva; Antonio André Novotny; Marcelo Nelson Paez Carreño
Advisor: Emílio Carlos Nelli Silva
Abstract

Electrothermomechanical (ETM) microsystems are systems in micrometric scale which operate based on thermoelastic effect deformation induced by heating the structure by means of an electrical current. Since a fast, damped and stable (at steady state) transient response is desirable with the aim of improving ETM efficiency, it is necessary to minimize the response time of the thermal effect which is the slowest phenomena among different physics involved in the ETM microsystems. This can be achieved by changing the ETM structural topology. Thus, in this work, the Topology Optimization Method (TOM) is applied to ETM microsystems design, taking into account transient thermal response in order to reduce their response time and to maximize their output displacement. The TOM combines optimization techniques with the finite element method (FEM) to distribute material in a fixed design domain in order to extremize a cost function subjected to some inherent constraints of the problem. The modeling of ETM microsystems is obtained by solving the governing equations using the linear FEM based on four-node isoparametric elements. Non-temperature dependent material properties are considered in the finite element models. The electrical problem is solved by considering a steady current static analysis; the transient state thermal problem considers a temperature distribution that varies over time. In the elastic domain, the mass and the damping effects are neglected, thus, resulting in a quasi-static problem. In the Topology Optimization formulation the material model is based on the Solid Isotropic Microstructure with Penalization (SIMP) model combined with a sensitivity filter and two penalty functions as solution control techniques to reduce mesh dependence and checkerboard problems intrinsic to the TOM. The penalty factors in SIMP are obtained through an analytical approach. Sequential Linear Programming (SLP) and Method of Moving Asymptotes (MMA) are used for solving the non-linear optimization problem. Two-dimensional results are presented to illustrate the method. Moreover, the final topologies are obtained by a shape interpretation algorithm and the dynamic optimization result is compared with steady-state optimization, which is implemented for comparative purposes. (AU)

FAPESP's process: 10/02263-0 - Design of electrothermomechanical (ETM) MEMS using topology optimization method (TOM) considering the thermal transient response
Grantee:Ruben Andres Salas Varela
Support Opportunities: Scholarships in Brazil - Master