Development of MEMS based inertial accelerometer

• Grant number: 10/11189-9
• Support type: Scholarships abroad - Research
• Effective date (Start): February 07, 2011
• Effective date (End): January 06, 2012
• Field of knowledge: Engineering - Aerospace Engineering - Aerospace Systems
• Principal researcher: Carlos Fernando Rondina Mateus
• Grantee: Carlos Fernando Rondina Mateus
• Host: Marco Antonio Sala Minucci
• Home Institution: Instituto de Estudos Avançados (IEAv). Departamento de Ciência e Tecnologia Aeroespacial (DCTA). Ministério da Defesa (Brasil). São José dos Campos , SP, Brazil
• Research place: Centre Suisse d'Electronique et de Microtechnique (CSEM), Switzerland

Abstract

The present project consists on the study and development of an accelerometer that uses micro-electro-mechanical (MEMS) technology, in order to contribute to the effective transference of this technology to the IEAv. MEMS technology consists basically on the integration of mechanical, sensor elements, actuators, and electronics in a common tablet of semiconductor, usually silicon, making use of micromachining technology. A project in course, financed by FINEP and led by the IEAv, consists on the technology transfer of this sensor from the Swiss Center of Electronics and Microtechnology (CSEM) to the IEAv. The execution of the project will have two critical moments in the technology transfer: the closing of the manufacture process, that will happen in March/April of 2011; and the second round of improvement of the sensor (after critical revision), to be initiated in August of 2011. The proponent of this grant is the General Manager of the FINEP project and the primary objective of the grant is to follow up in loco the details of the development, as a member of CSEM team, for the period of eleven months, with emphasis in the two critical phases previously cited. (AU)