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| Author(s): |
Marcus Vinicius Pelegrini
Total Authors: 1
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| Document type: | Doctoral Thesis |
| Press: | São Paulo. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 2016-05-16 |
| Examining board members: |
Inês Pereyra;
Ely Antonio Tadeu Dirani;
Marcia Carvalho de Abreu Fantini;
Ronaldo Domingues Mansano;
Alexandre Zirpoli Simões
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| Advisor: | Inês Pereyra |
| Abstract | |
This work, performed at the New Materials and Devices Group (GNMD) of the Microelectronics Laboratory of the Polytechnic School of the University of São Paulo, has the objective to correlate reactive sputtered-BST thin films to its deposition parameters, aiming to produce a 60 GHz tunable phase shifter. Thin film crystallinity and stoichiometry were correlated with sputtering deposition parameters and the type of substrate. A strong influence of the sputtering parameters was observed on BST crystallinity, mainly the temperature and the type of substrate. Thin films on copper are more crystalline than on Si (100). The stoichiometry, on the other hand, did not change as function of the deposition parameters or the substrate in both cases. The thin films electrical properties were obtained by capacitance vs voltage measurements, with the BST as linear dielectric of a parallel plate capacitor. The capacitors 1 MHz C-V characterization showed tunabilities as high as 44%, for an electrical permittivity of 310. These properties allowed a phase shifter project, resulting a 1,3 mm2 device with a figure of merit of 30 º/dB for 360 º phase shift. (AU) | |
| FAPESP's process: | 12/07048-6 - Deposition and characterization of BST aiming the fabrication of 60 GHz intelligent phase shifters. |
| Grantee: | Marcus Vinicius Pelegrini |
| Support Opportunities: | Scholarships in Brazil - Doctorate |