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| Author(s): |
Humberto Ferreira Vinhais
Total Authors: 1
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| Document type: | Master's Dissertation |
| Press: | São Paulo. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 2005-12-08 |
| Examining board members: |
Emilio Carlos Nelli Silva;
Ricardo Cury Ibrahim;
Domingos Alves Rade
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| Advisor: | Emilio Carlos Nelli Silva |
| Abstract | |
This work has the objective of studying and developing an optimized design of an electrostatic side-drive micromotor. This work is divided in three different steps: computational simulation, microfabrication and development of a software in C language to optimize a MEMS electrostatic micromotor design using the Topology Optimization Method (TOM). In an electrostatic side-drive motor, essentially, the induced electric loads in the rotor are attracted by electric loads of the stator, generating an electrostatic force that creates a mechanical torque in the rotor of the micromotor. After 1980, electrostatic motors have gained a new international perspective with the technology of micromanufacturing of MEMS (Micro-Electromechanical systems). Micromotors have become more popular in scientific researches in diverse fields of Engineering (developing micro-valves, micro-pumps, micro-sensors, etc), however, there are a few studies in literature about the design of these micromotors using computational and mathematical approaches, with the objective of optimizing quantities, such as, for example, its torque. Thus, to design an optimized electrostatic micromotor, computational simulations, using Finite Element Method (FEM), were performed to characterize the micromotor operation and to analyze the design variables influence in the final torque, with the objective of determining the optimum configurations that drive to the maximum torque in the micromotor. Then, the resultsof these simulations were considered to design and fabricate microscale prototypes using micromanufacturing techniques. At last, optimization techniques are used in this work to obtain the optimized topology of the rotor of the electrostatic micromotor that maximizes its final torque. (AU) | |