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| Author(s): |
Juan Manuel Jaramillo Ocampo
Total Authors: 1
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| Document type: | Doctoral Thesis |
| Press: | São Paulo. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 1999-12-17 |
| Examining board members: |
Edgar Charry Rodriguez;
Rogerio Furlan;
Raúl González Lima;
Renato Perez Ribas;
Mario Ricardo Gongora Rubio
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| Advisor: | Edgar Charry Rodriguez |
| Abstract | |
Many different microdevices, such as accelerometers, pressure sensors, fluid Microsystems, etc., have successfully been fabricated using standard foundries. The approach for micro-devices construction is called post-processing technology. This kind of technology was adopted in this work in order to develop a micropressure sensor to be placed on a catheter tip. The new idea presented in this work is to construct a micro-membrane, using bulk micromachining, and also leaving on this micro-membrane as fewer layers as possible. The standard foundry chosen was AMS, using 0.8 µm CMOS technology. The microsensor is constructed using Wheatstone bridge that is made by Boron diffusion, commonly used in the construction of source and drain of PMOS transistors. This kind of diffusion in the micro-sensor is named piezoresistor, which is connected to other piezoresitors by a metal layer, forming a Wheatstone bridge. The layout of the piezoresistors is defined using finite element software ANSYS. From several computer simulations, graphics of sensibility vs. thickness were found, and from these graphics many prototypes were constructed. Resuming: this work presents a novel methodology for pressure micro-sensor design and development, using the post-processing technology. (AU) | |