Daniel Lima Monteiro

CV Lattes

Universidade Estadual de Campinas (UNICAMP). Instituto de Física Gleb Wataghin (IFGW) (Institutional affiliation from the last research proposal)
Birthplace: Brazil

Daniel Lima Monteiro in research grants and scholarships supported by FAPESP.

News published in Agência FAPESP Newsletter about the researcher

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TITULO

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Scholarships in Brazil

Completed (most recent)

Abstract
During this project, will be developed a PECVD system for deposition of thin films of TiN using alcoxides cantaining Ti, by radiofrequency plasma. After this, the equipment will be improved and characterized in order to obtain control over the quantity of oxygen present to achieve more quality films.
Development and characterization of Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment for thin films deposition with titanium by radio frequency plasma, BP.IC

Virtual Library in numbers * Updated data on August 09, 2025

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1 / 1	Completed scholarships in Brazil

Associated processes

Most frequent collaborators in research granted by FAPESP

Fernando Alvarez

Keywords used by the researcher

Physical Sciences and Mathematics Physics

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Abstract