Characterization of amorphous hydrogenated chlorinated plasma polymers

Author(s)

Rossi, Diego ^[1] ; Schreiner, Wido H. ^[2] ; Durrant, Steven F. ^[1]

Affiliation

^[1] UNESP, Inst Ciencia & Tecnol Sorocaba, Lab Plasmas Tecnol, Sorocaba, SP - Brazil

^[2] Univ Fed Parana, Dept Fis, BR-80060000 Curitiba, Parana - Brazil

• Document type: Journal article
• Source: SURFACE & COATINGS TECHNOLOGY; v. 289, p. 118-123, MAR 15 2016.
• Web of Science Citations: 5

Abstract

Thin films were produced by plasma enhanced chemical vapor deposition from propanol-chloroform-argon mixtures. The main system parameter studied was the percentage of chloroform in the chamber feed, C-Cl Plasma polymers doped with chlorine were produced at deposition rates of up to 110 nm min(-1). As revealed by infrared and X-ray photoelectron spectroscopy, the films consisted of a hydrogenated carbon matrix with a carbon content of at least 80 at.%, and a roughly constant oxygen content of about 12 at.%. A maximum chlorine content of similar to 8 at.% was obtained. The surface contact angle of the films was around 75, and was reduced slightly at greater chlorine contents. Optical properties were obtained from ultraviolet-visible-near infrared spectroscopic data. While the refractive index of the films was around 1.56 independently of C-Cl, the chlorinated films showed a distinct optical gap of similar to 2.5 eV compared to similar to 1.9 eV for the unchlorinated film. (C) 2016 Elsevier B.V. All rights reserved. (AU)

• FAPESP's process: 14/21594-9 - Characterization of surfaces chlorinated in plasmas and chlorinated thin films deposited in plasmas
• Grantee: Steven Frederick Durrant
• Support type: Regular Research Grants