| Full text | |
| Author(s): |
Alvarez, Hugo S.
[1]
;
Cioldin, Frederico H.
[2]
;
Silva, Audrey R.
[2]
;
Espinola, Luana C. J.
[2]
;
Vaz, Alfredo R.
[2]
;
Diniz, Jose A.
[1]
Total Authors: 6
|
| Affiliation: | [1] UNICAMP FEEC, DSIF, BR-13081970 Sao Paulo - Brazil
[2] Univ Estadual Campinas, Ctr Componentes Semicond & Nanotecnol, BR-13083970 Campinas - Brazil
Total Affiliations: 2
|
| Document type: | Journal article |
| Source: | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS; v. 30, n. 4, p. 668-674, AUG 2021. |
| Web of Science Citations: | 0 |
| Abstract | |
In this work, thermally evaporated aluminum (Al) was used as hardmask (HM) to obtain silicon microchannels (SiMCs), using an Inductively Coupled Plasma - Reactive Ion Etching (ICP-RIE) system, in SF6/Ar gas mixture environment. The channel depth must be greater than 50 mu m, with a high aspect ratio. For this, Al HM lines were defined by photolithography and by Al wet etching on a silicon substrate. To improve the resistance against the ICP-RIE etching process, the Al HMs were treated with four different conditions: i) Al HM without treatment step (control sample); ii) with plasma nitridation (AlN/Al structure); iii) with thermal annealing (annealed Al film); iv) with plasma nitridation and annealing (annealed AlN/Al structure). After 100 min of ICP-RIE etching process, SiMC with depths of 90.6 mu m, 95 mu m, 91.2 mu m, and 109 mu m, respectively, were measured using a scan profiler system. As the main result, the annealed AlN/Al structure presented a high resistance against the ICP-RIE etching for 100 minutes. Furthermore, Scanning Electron Microscopy (SEM) images indicate an etch uniformity on the walls and bottom of the channels for all the samples. This parameter is a mandatory requirement to obtain the integrated microchannel liquid-cooling technology for heat sinks in photovoltaic cells and Complementary Metal-Oxide-Semiconductor microprocessors. (AU) | |
| FAPESP's process: | 16/09509-1 - Phase change heat transfer processes of high performance applied to solar energy recovery |
| Grantee: | Gherhardt Ribatski |
| Support Opportunities: | Research Projects - Thematic Grants |