| Full text | |
| Author(s): |
Verona, B. M.
;
Rehder, G. P.
;
Serrano, A. L. C.
;
Carreno, M. N. P.
;
Ferrari, P.
;
IEEE
Total Authors: 6
|
| Document type: | Journal article |
| Source: | 2014 44TH EUROPEAN MICROWAVE CONFERENCE (EUMC); v. N/A, p. 4-pg., 2014-01-01. |
| Abstract | |
This paper presents the first experimental results of a distributed-MEMS phase shifter for millimeter waves applications. It is based on a tunable shielded coplanar waveguide (S-CPW) fabricated using the back-end-of-line (BEOL) of AMS 0.35 mu m CMOS technology. A simple maskless post-CMOS etch was used to remove the BEOL silicon dioxide and release the ribbons of the S-CPW that can be electrostatically displaced, changing the capacitance of the S-CPW, altering the phase of the propagating signal. A phase shift of 25.1 degrees with an insertion loss of 0.7 dB was measured in an 1120 mu m-long S-CPW at 60 GHz, under a 60 V bias voltage, resulting in a Figure of Merit of 36 degrees/dB. The developed approach also leads to a small insertion loss variation of +/- 0.1 dB. These first results should be further improved by optimizing the mechanical design. (AU) | |
| FAPESP's process: | 11/18167-3 - RF MEMS for millimetric waves using commercial CMOS process |
| Grantee: | Gustavo Pamplona Rehder |
| Support Opportunities: | Research Grants - Young Investigators Grants |