| Author(s): |
Malheiros-Silveira, G. N.
;
Finardi, C. A.
;
Van Etten, E. A. M. A.
;
Burger, T. S.
;
da Silva, R. C. G.
;
Daltrini, A. M.
;
Panepucci, R. R.
;
IEEE
Total Authors: 8
|
| Document type: | Journal article |
| Source: | 2018 SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE (SBFOTON IOPC); v. N/A, p. 3-pg., 2018-01-01. |
| Abstract | |
Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers were processed at the foundry's 150 mm-facility. Photomask layout and manufacturing as well as wafer post-processing and characterization were carried out. As preliminary results, spectral filters based on integrated ring resonators with free spectral range (FSR) of 1 nm are presented. (AU) | |
| FAPESP's process: | 13/07559-3 - BRAINN - The Brazilian Institute of Neuroscience and Neurotechnology |
| Grantee: | Fernando Cendes |
| Support Opportunities: | Research Grants - Research, Innovation and Dissemination Centers - RIDC |