| Full text | |
| Author(s): |
Pellegrini, Paloma E. S.
;
Leitao, Luana de Moraes
;
Poma, Freddy Jara
;
Cioldin, Frederico H.
;
Nista, Silvia V. G.
;
Moshkalev, Stanislav
;
Hernandez-Figueroa, Hugo E.
Total Authors: 7
|
| Document type: | Journal article |
| Source: | 2024 SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE, SBFOTON IOPC 2024; v. N/A, p. 3-pg., 2024-01-01. |
| Abstract | |
This study develops a novel multi-step sputtering process to fabricate 150 nm thick TiO2 films in the pure anatase phase, overcoming challenges related to uncontrolled phase transitions during prolonged plasma exposure. By introducing a three-stage deposition approach with intervals, we achieve consistent phase purity and reproducibility. Raman spectroscopy and optical ellipsometry confirm the effectiveness of this method. The multi-step sputtering process is applied to the fabrication of TiO2 waveguides by thermal scanning probe lithography. (AU) | |
| FAPESP's process: | 22/11596-0 - Scientific EMU: acquisition of transmission and characterization equipment for ultra-high-speed data links |
| Grantee: | Darli Augusto de Arruda Mello |
| Support Opportunities: | Research Infrastructure Program - Scientific |
| FAPESP's process: | 21/11380-5 - CPTEn - São Paulo Center for the Study of Energy Transition |
| Grantee: | Luiz Carlos Pereira da Silva |
| Support Opportunities: | Research Grants - Science Centers for Development |
| FAPESP's process: | 21/00199-8 - SMART NEtworks and ServiceS for 2030 (SMARTNESS) |
| Grantee: | Christian Rodolfo Esteve Rothenberg |
| Support Opportunities: | Research Grants - Research Centers in Engineering Program |