Helium Ion Irradiation of Polymer Films Deposited from TMS-Ar Plasmas

Gelamo‚ R.V.; Durrant‚ S.F.; Trasferetti‚ B.C.; Davanzo‚ C.U.; Rouxinol‚ F.P.M.; Bica de Moraes‚ M.A.

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Helium Ion Irradiation of Polymer Films Deposited from TMS-Ar Plasmas

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Author(s):	Gelamo‚ R.V. ; Durrant‚ S.F. ; Trasferetti‚ B.C. ; Davanzo‚ C.U. ; Rouxinol‚ F.P.M. ; Bica de Moraes‚ M.A. Total Authors: 6
Document type:	Journal article
Source:	Plasma Processes and Polymers; v. 4, n. 4, p. 489-496, 2007.

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