Local structure and bonds of amorphous silicon oxynitride thin films

Scopel‚ WL; Fantini‚ MCA; Alayo‚ MI; Pereyra‚ I.

Advanced search

Search - Use quotation marks to get a more specific result

Index

Field of knowledge

Start date

Betweenand

(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Local structure and bonds of amorphous silicon oxynitride thin films

Full text
Author(s):	Scopel‚ WL ; Fantini‚ MCA ; Alayo‚ MI ; Pereyra‚ I. Total Authors: 4
Document type:	Journal article
Source:	Thin Solid Films; v. 413, n. 1, p. 59-64, 2002.

Short URL