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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Local structure and bonds of amorphous silicon oxynitride thin films

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Author(s):
Scopel‚ WL ; Fantini‚ MCA ; Alayo‚ MI ; Pereyra‚ I.
Total Authors: 4
Document type: Journal article
Source: Thin Solid Films; v. 413, n. 1, p. 59-64, 2002.