Ion implantation for plasma torches

Jankov‚ IR; Goldman‚ ID; Szente‚ RN

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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Ion implantation for plasma torches

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Author(s):	Jankov‚ IR ; Goldman‚ ID ; Szente‚ RN Total Authors: 3
Document type:	Journal article
Source:	VACUUM; v. 65, n. 3, p. 547-553, 2002.

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