Self-organized 2D Ni particles deposited on titanium oxynitride-coated Si sculpted by a low energy ion beam

Author(s)

Morales, M. ^[1] ; Merlo, R. B. ^[1] ; Droppa, Jr., R. ^[2] ; Alvarez, F. ^[1]

Affiliation

^[1] Univ Estadual Campinas, Inst Fis Gleb Wataghin, BR-13081970 Campinas, SP - Brazil

^[2] Univ Fed ABC, Ctr Ciencias Nat & Humanas, BR-09210170 Santo Andre - Brazil

• Document type: Journal article
• Source: JOURNAL OF PHYSICS D-APPLIED PHYSICS; v. 47, n. 19 MAY 14 2014.
• Web of Science Citations: 2

Abstract

Self-ordered Ni nanoparticles grown on TiNxOy-coated crystalline silicon previously sculpted by ion beam bombardment are reported. The samples are obtained following a sequential in situ routine deposition procedure. First, crystalline Si is Xe+ bombarded, generating regular patterns. Second, a thin TiNxOy film is grown on the patterned Si substrate. Immediately, nano-sized nickel particles are deposited by ion beam sputtering and temperature-annealed forming a 2D lattice. The self-organized Ni islands are induced by preferential Ni site nucleation on the coated sculpted Si grooves. (AU)

• FAPESP's process: 12/10127-5 - Research and development of nanostructured materials for electronic and surface physics applications
• Grantee: Fernando Alvarez
• Support Opportunities: Research Projects - Thematic Grants