Sims analyses of silicon oxynitride films formed by n2+ and no+ implantation.

• Grant number: 97/06907-3
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: September 07, 1997
• End date: September 12, 1997
• Field of knowledge: Physical Sciences and Mathematics - Physics - Condensed Matter Physics
• Principal Investigator: Marcio Alberto Araujo Pudenzi
• Grantee: Marcio Alberto Araujo Pudenzi
• Host Institution: Instituto de Física Gleb Wataghin (IFGW). Universidade Estadual de Campinas (UNICAMP). Campinas , SP, Brazil
• Associated research grant: 92/03453-8 - HBIFET Technology: process and characterization, AP.TEM