Films deposition and surface modification using plasma immersion with pulsed bias ...
Deposition of thick DLC films using plasma immersion with pulsed bias on the subst...
Final testing and application of a new type of ion implanter
Effects of ion implantation on complex amorphous thin films produced by plasma enh...
Thin hydrogenated amorphous carbon films also containing Halogens produced by Plas...
Alumina film deposition assisted by plasma immersion ion implantation
Deposition of diamond-like carbon films on metal substrates by plasma immersion io...