Development of a cluster tool and analysis of deposition oxide by teos/o2 pecvd.

• Grant number: 96/01329-9
• Support Opportunities: Research Grants - Meeting - Abroad
• Start date: April 08, 1996
• End date: April 12, 1996
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Nilton Itiro Morimoto
• Grantee: Nilton Itiro Morimoto
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil
• Associated research grant: 92/03452-1 - Stress measurement in thin films applied in technology of integradted circuits, AP.TEM