Determination of the silicon film doping concentration and the back interface oxide charge density using soi-nmos gate capacitor.

• Grant number: 02/04873-4
• Support Opportunities: Research Grants - Meeting - Brazil
• Start date: September 09, 2002
• End date: September 14, 2002
• Field of knowledge: Engineering - Electrical Engineering - Electrical Materials
• Principal Investigator: Victor Sonnenberg
• Grantee: Victor Sonnenberg
• Host Institution: Faculdade de Tecnologia São Paulo (FATEC São Paulo). Centro Paula Souza (CEETEPS). Secretaria de Desenvolvimento Econômico (São Paulo - Estado). São Paulo , SP, Brazil