| Grant number: | 07/04731-9 |
| Support Opportunities: | Scholarships in Brazil - Scientific Initiation |
| Start date: | October 01, 2007 |
| End date: | September 30, 2008 |
| Field of knowledge: | Engineering - Mechanical Engineering - Manufacturing Processes |
| Principal Investigator: | Deniol Katsuki Tanaka |
| Grantee: | Carlos Eduardo Keutenedjian Mady |
| Host Institution: | Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil |
Abstract The objective of this work is the measurement of residual stresses in titanium nitride thin films through two different methods. One of the methods is the X-Ray diffraction, which is traditionally used for this purpose. The other method is instrumented indentation; a technique already well developed for the calculation of hardness and Young modulus, but not entirely developed for the calculation of residual stresses. Attempts to measure this type of stresses, based on instrumented indentation data, will follow the procedure proposed by Suresh & Giannakopoulos, as well as methods proposed more recently. During this work, titanium nitride films will be deposited onto stainless steel substrates in several deposition runs. During these runs, the deposition parameters will be altered in order to obtain films with different residual stress levels. | |
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