Full text
| |
| Author(s): |
Deilton Reis Martins
Total Authors: 1
|
| Document type: | Master's Dissertation |
| Press: | São Paulo. , gráficos, ilustrações, tabelas. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 2002-06-10 |
| Examining board members: |
Maria Cecilia Barbosa da Silveira Salvadori;
Mauro Sergio Dorsa Cattani;
Ronaldo Domingues Mansano
|
| Advisor: | Maria Cecilia Barbosa da Silveira Salvadori |
| Field of knowledge: | Physical Sciences and Mathematics - Physics |
| Indexed in: | Banco de Dados Bibliográficos da USP-DEDALUS |
| Location: | Universidade de São Paulo. Biblioteca Central da Escola Politécnica; EPBC/FD-3122 |
| Abstract | |
In this work thin films are obtained from plasma generated by electric current. This process, known as filtered cathodic arc, is largely used in technological applications as to coat or modify surfaces. We present a description of this method and details of the equipment construction, like the electric circuit for generation of the cathodic arc. After the equipment construction we begin to study the films contamination in function of previous elements used in the deposition chamber, that is, contamination study by memory effect. As part of this memory effect study, we analyzed the problem of the persistence of this effect during the deposition process. Finally, results are presented about oxygen contamination of aluminum films. (AU) | |