Full text
| |
| Author(s): |
Marcelo Silva Guimarães
Total Authors: 1
|
| Document type: | Master's Dissertation |
| Press: | São Paulo. , gráficos, ilustrações, tabelas. |
| Institution: | Universidade de São Paulo (USP). Escola Politécnica (EP/BC) |
| Defense date: | 2002-03-18 |
| Examining board members: |
Amilton Sinatora;
Marcelo Nelson Paez Carreno;
Luiz Otávio Saraiva Ferreira
|
| Advisor: | Amilton Sinatora |
| Field of knowledge: | Engineering - Materials and Metallurgical Engineering |
| Indexed in: | Banco de Dados Bibliográficos da USP-DEDALUS; Biblioteca Digital de Teses e Dissertações - USP |
| Location: | Universidade de São Paulo. Biblioteca Central da Escola Politécnica; FD-3030; Universidade de São Paulo. Escola Politécnica. Biblioteca de Engenharia Mecânica, Naval e Oceânica; FD-3030 |
| Abstract | |
An important factor to develop microsystems is knowledge of materials properties and failure mechanisms. This research studies the thermal actuated microbeam mechanical behavior and propose a method in order to characterize thermomechanical properties of thin films. Silicon Oxynitride microbeams are fabricated and Nomarski microscopy was applied to observe strain and buckling phenomenon ocurrence. (AU) | |