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(Reference retrieved automatically from SciELO through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Comparison of RF and Pulsed Magnetron Sputtering for the Deposition of AZO Thin Films on PET

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Author(s):
L. P. G. Oliveira [1] ; R. Ramos [2] ; W. H. Rabelo [3] ; E. C. Rangel [4] ; Steven F. Durrant [5] ; J. R. R. Bortoleto [6]
Total Authors: 6
Affiliation:
[1] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
[2] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
[3] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
[4] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
[5] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
[6] Universidade Estadual Paulista. Instituto de Ciência e Tecnologia de Sorocaba - Brasil
Total Affiliations: 6
Document type: Journal article
Source: MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS; v. 23, n. 3 2020-07-22.
Abstract

AZO thin films (around 200 nm thick) were grown on polyethylene terephthalate (PET) at room temperature. The plasma was activated using a 13.56 MHz (RF) or a 15 kHz pulsed (PMS) source at a power of 60 W. Optical reflection and transmittance were measured using a UV-Vis-NIR spectrometer over the wavelengths from 190 nm to 2500 nm. All samples show average transmittances greater than 83% in the visible region. The electrical resistivity was measured by the linear four-point probe method to be around 0.001 Ωcm for 200 nm-thick AZO films grown by PMS. XRD results indicated that the films had a hexagonal wurtzite structure and were preferentially oriented in the (002) plane. The surface morphology of the AZO thin films was characterized using Scanning Electron Microscopy (SEM); film chemical composition was studied using Energy Dispersive X-ray Spectroscopy (EDS). For this, an EDS coupled to the Scanning Electron Microscope was used. Only for films grown by PMS were no cracks observed. (AU)

FAPESP's process: 17/15853-0 - Characterization of Complex Thin Films Obtained by PECVD and the Deposition of Thin Films on Porous Substrates
Grantee:Steven Frederick Durrant
Support Opportunities: Regular Research Grants