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(Reference retrieved automatically from SciELO through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Growth and Characterization of Polycrystalline CVD Diamond Films Obtained by MWPACVD at High Power 2,45GHz Microwave Discharge

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Author(s):
J. V. Silva Neto [1] ; J. S. Gómez [2] ; E. J. Corat [3] ; V. J. Trava-Airoldi [4]
Total Authors: 4
Affiliation:
[1] Instituto Nacional de Pesquisas Espaciais - Brasil
[2] Instituto Nacional de Pesquisas Espaciais - Brasil
[3] Instituto Nacional de Pesquisas Espaciais - Brasil
[4] Instituto Nacional de Pesquisas Espaciais - Brasil
Total Affiliations: 4
Document type: Journal article
Source: MATERIALS RESEARCH-IBERO-AMERICAN JOURNAL OF MATERIALS; v. 25, 2022-09-05.
Abstract

Among all the allotropic forms of carbon, diamond has attracted a broad scientific and technological interest for its extreme and unique properties rarely matched by other materials in nature. In a rapid rise from a technological point of view, much has been achieved in the study of obtaining this material through CVD technique. Studies of CVD diamond growth parameters of monocrystalline structure, underway in the team, are very expensive and time-consuming requiring in-depth studies of CVD diamond growth parameters of polycrystalline structure. So, this work presents an analysis focused on obtaining CVD diamond films with polycrystalline structure through the 2.45 GHz microwave plasma activation method (MWPACVD) in high power regime using a modified substrate holder to find a set of parameters appropriated for getting uniform quality and growth rate of thick films. The films were characterized using Raman scattering spectroscopy and scanning electron microscopy. The results point to optimized conditions for depositing films with growth rates of up to 20 µm/h with low levels of intrinsic stress, good structural quality and uniform microcrystalline morphology along the deposition surface. (AU)

FAPESP's process: 19/18572-7 - New carbon materials: their relevant space, environmental and relevant spin off applications
Grantee:Evaldo Jose Corat
Support Opportunities: Research Projects - Thematic Grants
FAPESP's process: 12/15857-1 - Scientific studies and innovation application on CVD diamond, DLC and carbon nanostructures obtained by chemical vapor deposition technique
Grantee:Vladimir Jesus Trava-Airoldi
Support Opportunities: Research Projects - Thematic Grants