| Author(s): |
Cirino, Giuseppe A.
;
Barea, Luis A.
;
von Zuben, Antonio A.
;
L'hermite, Herve
;
Beche, Bruno
;
De Sagazan, Olivier
;
Frateschi, Newton
;
M-Brahim, Tayeb
;
IEEE
Total Authors: 9
|
| Document type: | Journal article |
| Source: | 2016 31ST SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO); v. N/A, p. 4-pg., 2016-01-01. |
| Abstract | |
This work reports the design and fabrication of silicon nitride-based microresonators by employing DUV optical lithography and ICP-RIE plasma etching. Microring devices with high Q factors provide high sensitivity and low detection limit, enabling their use in biochemical sensing applications. With these properties, the devices can be used to detect and quantify the biomolecules present in a homogeneous solution, by detecting an effective refractive index change, without using fluorescent labels. (AU) | |
| FAPESP's process: | 14/04748-2 - Coupled microresonators applied to signal processing and photonics integration |
| Grantee: | Mário César Mendes Machado de Souza |
| Support Opportunities: | Scholarships in Brazil - Doctorate |
| FAPESP's process: | 08/57862-6 - NAMITEC |
| Grantee: | Jacobus Willibrordus Swart |
| Support Opportunities: | Research Projects - Thematic Grants |