Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS

Guimarães‚ MS; Sinatora‚ A.; Alayo‚ MI; Pereyra‚ I.; Carreño‚ MNP

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(Reference retrieved automatically from Google Scholar through information on FAPESP grant and its corresponding number as mentioned in the publication by the authors.)

Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS

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Author(s):	Guimarães‚ MS ; Sinatora‚ A. ; Alayo‚ MI ; Pereyra‚ I. ; Carreño‚ MNP Total Authors: 5
Document type:	Journal article
Source:	Thin Solid Films; v. 398, p. 626-631, 2001.

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