| Full text | |
| Author(s): |
Motta, Edison F.
[1]
;
Viana, Gustavo A.
[1]
;
Silva, Douglas S.
[1]
;
Cortes, Andresa D. S.
[1]
;
Freire, Jr., Fernando L.
[2]
;
Marques, Francisco C.
[1]
Total Authors: 6
|
| Affiliation: | [1] Univ Estadual Campinas, UNICAMP, Inst Fis Gleb Wataghin, BR-13083859 Campinas, SP - Brazil
[2] Pontificia Univ Catolica Rio de Janeiro, Dept Fis, BR-22453970 Rio De Janeiro - Brazil
Total Affiliations: 2
|
| Document type: | Journal article |
| Source: | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A; v. 31, n. 2 MAR 2013. |
| Web of Science Citations: | 6 |
| Abstract | |
The structural, surface, and thermomechanical properties of intrinsic and argon incorporated tetrahedral amorphous carbon films deposited using the filtered cathodic vacuum arc process are reported. Argon atoms were simultaneously incorporated during the deposition of the films using an argon ion gun in the energy range of 0-180 eV. Contact angle measurements revealed that all of the deposited films are hydrophobic, regardless of the substrate bias voltage that was applied during the depositions. Thermal desorption spectroscopy measurements revealed that high argon bombarding energy favors films that are structurally more compact and thermally more stable. An investigation unbinding the mechanism of argon effusion and intrinsic stress relief is presented. (C) 2013 American Vacuum Society. {[}http://dx.doi.org/10.1116/1.4774326] (AU) | |
| FAPESP's process: | 05/53926-1 - Research and development of new materials of interest in nanotechnology: applications in (micro-) electronics and metal-mechanics industries |
| Grantee: | Fernando Alvarez |
| Support Opportunities: | Research Projects - Thematic Grants |