Multiuser equipment approved in grant 2012/50259-8: atomic layer deposition

• Grant number: 18/24380-0
• Support type: Multi-user Equipment Program
• Duration: February 01, 2019 - January 31, 2026
• Field of knowledge: Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
• Principal researcher: Eunezio Antonio de Souza
• Grantee: Eunezio Antonio de Souza
• Home Institution: Instituto Mackenzie de Pesquisas em Grafeno e Nanotecnologias. Universidade Presbiteriana Mackenzie (UPM). Instituto Presbiteriano Mackenzie. São Paulo , SP, Brazil
• Associated research grant: 12/50259-8 - Graphene: photonics and opto-electronics: UPM-NUS collaboration, AP.SPEC
• EMU web page: https://www.mackenzie.br/mackgraphe/laboratorio-multiusuario
• Type of equipment: Processos Físicos - Litografia - Laser; Processos Físicos - Litografia - Óptica; Processos Físicos - Deposição filmes finos - Evaporador
• Manufacturer: Quantum Design
• Model: GEM-Star XT-S

Abstract

This equipment allows the manufacture of electro-optical devices using thin film deposition technique of atomic thickness. With it, it will be possible to deposit dielectric layers of the order of a few nanometers in capacitive structures based on two-dimensional materials. (AU)