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Multiuser equipment approved in grant 2012/50259-8: atomic layer deposition

Grant number: 18/24380-0
Support type:Multi-user Equipment Program
Duration: February 01, 2019 - January 31, 2026
Field of knowledge:Engineering - Electrical Engineering - Electrical, Magnetic and Electronic Measurements, Instrumentation
Principal Investigator:Eunezio Antonio de Souza
Grantee:Eunezio Antonio de Souza
Home Institution: Centro de Pesquisas Avançadas em Grafeno, Nanomateriais e Nanotecnologia (MackGrafe). Universidade Presbiteriana Mackenzie (UPM). Instituto Presbiteriano Mackenzie. São Paulo , SP, Brazil
Associated research grant:12/50259-8 - Graphene: photonics and opto-electronics: UPM-NUS collaboration, AP.SPEC
As informações de acesso ao Equipamento Multiusuário são de responsabilidade do Pesquisador responsável
EMU web page:https://www.mackenzie.br/mackgraphe/pesquisa/equipamento-multiusuario/
Tipo de equipamento:Processos Físicos - Litografia - Laser
Processos Físicos - Litografia - Óptica
Processos Físicos - Deposição filmes finos - Evaporador
Fabricante: Quantum Design
Modelo: GEM-Star XT-S

Abstract

This equipment allows the manufacture of electro-optical devices using thin film deposition technique of atomic thickness. With it, it will be possible to deposit dielectric layers of the order of a few nanometers in capacitive structures based on two-dimensional materials. (AU)