Atomistic simulation of MEMS microfabrication processes

• Grant number: 09/06766-0
• Support Opportunities: Scholarships in Brazil - Master
• Start date: August 01, 2009
• End date: January 31, 2011
• Field of knowledge: Engineering - Electrical Engineering
• Principal Investigator: Marcelo Nelson Páez Carreño
• Grantee: Fábio Belotti Colombo
• Host Institution: Escola Politécnica (EP). Universidade de São Paulo (USP). São Paulo , SP, Brazil

Academic Publications

(References retrieved automatically from State of São Paulo Research Institutions)

COLOMBO, Fábio Belotti. Development of a atomistic microfabrication simulation software based on celullar automata.. 2011. Master's Dissertation - Universidade de São Paulo (USP). Escola Politécnica (EP/BC) São Paulo.