Development of a atomistic microfabrication simulation software based on celullar automata.

Author(s)

Fábio Belotti Colombo

• Document type: Master's Dissertation
• Press: São Paulo.
• Institution: Universidade de São Paulo (USP). Escola Politécnica (EP/BC)
• Defense date: 2011-05-30

Examining board members

Marcelo Nelson Paez Carreño; Fabiano Fruett; Emílio Carlos Nelli Silva

• Advisor: Marcelo Nelson Paez Carreño

Abstract

The main goal of this project is the development of a software capable of simulating both surface and bulk micromachining based on a cellular automata approach. This software has been called simMEMS. In order to enable future versions of the software to also be able to analyze the structures created by the software, a module capable of running a mechanical analysis through the finite element method is also developed. simMEMS allows the user to simulate two bulk micromachining processes: wet anisotropic KOH etching and deep reactive ion etching DRIE. The wet etching simulator uses a cellular automaton known as BCA. The DRIE simulator uses an automaton developed during this project. The surface micromachining simulator allows the user to simulate four types of processes: photolithography, film deposition, film etching and substrate planarization. Several automata for the deposition and etching of films are studied and the results of this study are presented here. All processes, be they for surface or bulk micromachining, can be used on the same substrate to simulate the entire fabrication process for a large array of devices. This makes simMEMS a very useful software. (AU)

• FAPESP's process: 09/06766-0 - Atomistic simulation of MEMS microfabrication processes
• Grantee: Fábio Belotti Colombo
• Support Opportunities: Scholarships in Brazil - Master